Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference

标题
Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference
作者
关键词
Elliptical subwavelength nanohole arrays, Lithography, Waveguide mode interference, Asymmetric metal-cladding dielectric waveguide
出版物
Results in Physics
Volume 14, Issue -, Pages 102460
出版商
Elsevier BV
发表日期
2019-06-21
DOI
10.1016/j.rinp.2019.102460

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