Feasibility investigation on ductile machining of single-crystal silicon for deep micro-structures by ultra-precision fly cutting

出版年份 2019 全文链接

标题

作者

关键词

Ductile machining process, Micro-structures, Single-crystal silicon, Tool wear

出版物

Volume 45, Issue -, Pages 176-187

出版商

Elsevier BV

发表日期

2019-07-10

DOI

10.1016/j.jmapro.2019.05.045

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