Differences between (103) and (002) X-ray diffraction characteristics of nanostructured AZO films deposited by RF magnetron sputtering

Published 2019 View Full Article

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Title
Differences between (103) and (002) X-ray diffraction characteristics of nanostructured AZO films deposited by RF magnetron sputtering
Authors
Keywords
X-ray diffraction, AZO, Magnetron sputtering, (103) plane, GI XRD, Nanostructure
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 372, Issue -, Pages 442-450
Publisher
Elsevier BV
Online
2019-05-15
DOI
10.1016/j.surfcoat.2019.05.033

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