Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering

Published 2019 View Full Article

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Title
Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering
Authors
Keywords
MoN film, MoCN film, High temperature annealing, Tribological properties, Mechanical behavior
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 374, Issue -, Pages 725-735
Publisher
Elsevier BV
Online
2019-06-22
DOI
10.1016/j.surfcoat.2019.06.062

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