Physical and micro-nano-structure properties of chromium nitride coating deposited by RF sputtering using dynamic glancing angle deposition

Published 2019 View Full Article

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Title
Physical and micro-nano-structure properties of chromium nitride coating deposited by RF sputtering using dynamic glancing angle deposition
Authors
Keywords
Dynamic glancing angle deposition, Chromium nitride, Hardness, Multi-nano periodic structures
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 372, Issue -, Pages 268-277
Publisher
Elsevier BV
Online
2019-05-16
DOI
10.1016/j.surfcoat.2019.05.023

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