Nano-fabrication methods and novel applications of black silicon

Published 2019 View Full Article

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Title
Nano-fabrication methods and novel applications of black silicon
Authors
Keywords
Black silicon, Nanomaterial, Nano-fabrication technologies, Low light reflection loss, Mechano-bactericidal surface
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 295, Issue -, Pages 560-573
Publisher
Elsevier BV
Online
2019-05-31
DOI
10.1016/j.sna.2019.04.044

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