Nano-fabrication methods and novel applications of black silicon

标题
Nano-fabrication methods and novel applications of black silicon
作者
关键词
Black silicon, Nanomaterial, Nano-fabrication technologies, Low light reflection loss, Mechano-bactericidal surface
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 295, Issue -, Pages 560-573
出版商
Elsevier BV
发表日期
2019-05-31
DOI
10.1016/j.sna.2019.04.044

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