A low noise capacitive MEMS accelerometer with anti-spring structure

Published 2019 View Full Article

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Title
A low noise capacitive MEMS accelerometer with anti-spring structure
Authors
Keywords
Anti-spring design, Allan deviation, Capacitive accelerometer, Frequency drift, Low noise, Seismic application, Thermal effect
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 296, Issue -, Pages 79-86
Publisher
Elsevier BV
Online
2019-06-28
DOI
10.1016/j.sna.2019.06.051

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