A low noise capacitive MEMS accelerometer with anti-spring structure

标题
A low noise capacitive MEMS accelerometer with anti-spring structure
作者
关键词
Anti-spring design, Allan deviation, Capacitive accelerometer, Frequency drift, Low noise, Seismic application, Thermal effect
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 296, Issue -, Pages 79-86
出版商
Elsevier BV
发表日期
2019-06-28
DOI
10.1016/j.sna.2019.06.051

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