Characterization of GZO thin films fabricated by RF magnetron sputtering method and electrical properties of In/GZO/Si/Al diode

Title
Characterization of GZO thin films fabricated by RF magnetron sputtering method and electrical properties of In/GZO/Si/Al diode
Authors
Keywords
Ga-doped ZnO, Thin film, Gaussian distribution, Interface states
Publisher
Springer Science and Business Media LLC
Online
2019-09-29
DOI
10.1007/s10854-019-02286-w

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