Characterization of GZO thin films fabricated by RF magnetron sputtering method and electrical properties of In/GZO/Si/Al diode
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Title
Characterization of GZO thin films fabricated by RF magnetron sputtering method and electrical properties of In/GZO/Si/Al diode
Authors
Keywords
Ga-doped ZnO, Thin film, Gaussian distribution, Interface states
Journal
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume -, Issue -, Pages -
Publisher
Springer Science and Business Media LLC
Online
2019-09-29
DOI
10.1007/s10854-019-02286-w
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