Multifractal analysis of sputtered indium tin oxide thin film surfaces

Published 2019 View Full Article

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Title
Multifractal analysis of sputtered indium tin oxide thin film surfaces
Authors
Keywords
Atomic force microscopy (AFM), DC magnetron sputtering, ITO thin films, Multifractal analysis, 3-D surface microtexture
Journal
APPLIED SURFACE SCIENCE
Volume 484, Issue -, Pages 892-898
Publisher
Elsevier BV
Online
2019-04-16
DOI
10.1016/j.apsusc.2019.04.170

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