Multifractal analysis of sputtered indium tin oxide thin film surfaces

标题
Multifractal analysis of sputtered indium tin oxide thin film surfaces
作者
关键词
Atomic force microscopy (AFM), DC magnetron sputtering, ITO thin films, Multifractal analysis, 3-D surface microtexture
出版物
APPLIED SURFACE SCIENCE
Volume 484, Issue -, Pages 892-898
出版商
Elsevier BV
发表日期
2019-04-16
DOI
10.1016/j.apsusc.2019.04.170

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