Research on ground surface characteristics of prism-plane sapphire under the orthogonal grinding direction

Published 2019 View Full Article

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Title
Research on ground surface characteristics of prism-plane sapphire under the orthogonal grinding direction
Authors
Keywords
Sapphire, Grinding direction, Surface topography, Residual stress, Lattice distortion
Journal
APPLIED SURFACE SCIENCE
Volume 489, Issue -, Pages 802-814
Publisher
Elsevier BV
Online
2019-06-04
DOI
10.1016/j.apsusc.2019.06.019

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