Research on ground surface characteristics of prism-plane sapphire under the orthogonal grinding direction

标题
Research on ground surface characteristics of prism-plane sapphire under the orthogonal grinding direction
作者
关键词
Sapphire, Grinding direction, Surface topography, Residual stress, Lattice distortion
出版物
APPLIED SURFACE SCIENCE
Volume 489, Issue -, Pages 802-814
出版商
Elsevier BV
发表日期
2019-06-04
DOI
10.1016/j.apsusc.2019.06.019

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