Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

Development Of 6-Degree-of-Freedom (DOF) Inertial Sensors With A 8-inch Advanced MEMS Fabrication Platform

(2018) Guoqiang Wu et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators

(2018) Faisal Iqbal et al.   Micromachines

Design and analysis of a new three-axis micro-gyroscope

(2017) Bo Yang et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearity

(2017) G.Q. Wu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

(2016) Muhammad Ali Shah et al.   Journal of Sensors

Single-Structure Micromachined Three-Axis Gyroscope With Reduced Drive-Force Coupling

(2015) Soner Sonmezoglu et al.   IEEE ELECTRON DEVICE LETTERS

An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth

(2014) Soner Sonmezoglu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Study on a vibratory tri-axis MEMS gyroscope with single drive and multiple axes angular rate sense

(2014) Zhang Tingkai et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

The Development of Micromachined Gyroscope Structure and Circuitry Technology

(2014) Dunzhu Xia et al.   SENSORS

Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

(2012) Erdinc Tatar et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Bias Contributions in a MEMS Tuning Fork Gyroscope

(2012) Arnaud Walther et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications

(2009) Cenk Acar et al.   IEEE SENSORS JOURNAL

A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope

(2008) Said Emre Alper et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A substrate energy dissipation mechanism in in-phase and anti-phase micromachinedz-axis vibratory gyroscopes

(2008) Alexander A Trusov et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING