Manufacturing of 3D multifunctional microelectronic devices: challenges and opportunities
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Title
Manufacturing of 3D multifunctional microelectronic devices: challenges and opportunities
Authors
Keywords
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Journal
NPG Asia Materials
Volume 11, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2019-06-21
DOI
10.1038/s41427-019-0129-7
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