Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna‐Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy
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Title
Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna‐Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy
Authors
Keywords
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Journal
Small
Volume -, Issue -, Pages 1901504
Publisher
Wiley
Online
2019-07-26
DOI
10.1002/smll.201901504
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