Reference-free evaluation of thin films mass thickness and composition through energy dispersive X-ray spectroscopy

Published 2019 View Full Article

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Title
Reference-free evaluation of thin films mass thickness and composition through energy dispersive X-ray spectroscopy
Authors
Keywords
Energy dispersive X-ray spectroscopy (EDS), Electron probe microanalysis (EPMA), Thin film, Mass thickness, Chemical composition, Electron transport
Journal
MATERIALS CHARACTERIZATION
Volume 153, Issue -, Pages 92-102
Publisher
Elsevier BV
Online
2019-04-27
DOI
10.1016/j.matchar.2019.04.030

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