Improvement of NiMoNb to polyimide adhesion by inductively coupled nitrogen plasma treatment

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Title
Improvement of NiMoNb to polyimide adhesion by inductively coupled nitrogen plasma treatment
Authors
Keywords
NiMoNb, Peel strength, ICP treatment, Film density
Journal
APPLIED SURFACE SCIENCE
Volume 360, Issue -, Pages 553-558
Publisher
Elsevier BV
Online
2015-10-31
DOI
10.1016/j.apsusc.2015.10.202

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