Improvement of NiMoNb to polyimide adhesion by inductively coupled nitrogen plasma treatment

标题
Improvement of NiMoNb to polyimide adhesion by inductively coupled nitrogen plasma treatment
作者
关键词
NiMoNb, Peel strength, ICP treatment, Film density
出版物
APPLIED SURFACE SCIENCE
Volume 360, Issue -, Pages 553-558
出版商
Elsevier BV
发表日期
2015-10-31
DOI
10.1016/j.apsusc.2015.10.202

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