Fabrication of two-dimensional periodic structures on silicon after scanning irradiation with femtosecond laser multi-beams

Published 2016 View Full Article

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Title
Fabrication of two-dimensional periodic structures on silicon after scanning irradiation with femtosecond laser multi-beams
Authors
Keywords
Femtosecond laser, Silicon, Periodic structures, Combined structures
Journal
APPLIED SURFACE SCIENCE
Volume 368, Issue -, Pages 443-448
Publisher
Elsevier BV
Online
2016-02-02
DOI
10.1016/j.apsusc.2016.01.269

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