Fabrication of two-dimensional periodic structures on silicon after scanning irradiation with femtosecond laser multi-beams

出版年份 2016 全文链接

标题

作者

关键词

Femtosecond laser, Silicon, Periodic structures, Combined structures

出版物

APPLIED SURFACE SCIENCE

Volume 368, Issue -, Pages 443-448

出版商

Elsevier BV

发表日期

2016-02-02

DOI

10.1016/j.apsusc.2016.01.269

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