Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering

Published 2016 View Full Article

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Title
Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering
Authors
Keywords
Al–F co-doped ZnO, Transparent conducting oxide (TCO), Thin film, magnetron sputtering, Substrate temperature
Journal
APPLIED SURFACE SCIENCE
Volume 370, Issue -, Pages 83-91
Publisher
Elsevier BV
Online
2016-02-21
DOI
10.1016/j.apsusc.2016.02.161

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