Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering

出版年份 2016 全文链接

标题

作者

关键词

Al–F co-doped ZnO, Transparent conducting oxide (TCO), Thin film, magnetron sputtering, Substrate temperature

出版物

Volume 370, Issue -, Pages 83-91

出版商

Elsevier BV

发表日期

2016-02-21

DOI

10.1016/j.apsusc.2016.02.161

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