A data-driven approach to selection of critical process steps in the semiconductor manufacturing process considering missing and imbalanced data

Published 2019 View Full Article

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Title
A data-driven approach to selection of critical process steps in the semiconductor manufacturing process considering missing and imbalanced data
Authors
Keywords
Semiconductor manufacturing, Data mining, Missing value imputation, Re-Sampling, Feature selection
Journal
JOURNAL OF MANUFACTURING SYSTEMS
Volume 52, Issue -, Pages 146-156
Publisher
Elsevier BV
Online
2019-07-16
DOI
10.1016/j.jmsy.2019.07.001

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