A data-driven approach to selection of critical process steps in the semiconductor manufacturing process considering missing and imbalanced data

出版年份 2019 全文链接

标题

作者

关键词

Semiconductor manufacturing, Data mining, Missing value imputation, Re-Sampling, Feature selection

出版物

Volume 52, Issue -, Pages 146-156

出版商

Elsevier BV

发表日期

2019-07-16

DOI

10.1016/j.jmsy.2019.07.001

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