On Investigations of the Optical Absorption Coefficient of Gold and Germanium Implanted Silicon with the Use of the Non-destructive Contactless Photo Thermal Infrared Radiometry
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Title
On Investigations of the Optical Absorption Coefficient of Gold and Germanium Implanted Silicon with the Use of the Non-destructive Contactless Photo Thermal Infrared Radiometry
Authors
Keywords
Ion implanted silicon, nondestructive optical characterization, optical absorption coefficient, photo thermal infrared radiometry technique, implanted areas imaging
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 48, Issue 8, Pages 5273-5278
Publisher
Springer Science and Business Media LLC
Online
2019-06-11
DOI
10.1007/s11664-019-07333-0
References
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