Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition

Title
Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 108, Issue 24, Pages 241906
Publisher
AIP Publishing
Online
2016-06-15
DOI
10.1063/1.4953779

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