Fabrication and characterization of a co-planar detector in diamond for low energy single ion implantation
Published 2016 View Full Article
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Title
Fabrication and characterization of a co-planar detector in diamond for low energy single ion implantation
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 109, Issue 6, Pages 063502
Publisher
AIP Publishing
Online
2016-08-10
DOI
10.1063/1.4960968
References
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