Single ion implantation for single donor devices using Geiger mode detectors

Title
Single ion implantation for single donor devices using Geiger mode detectors
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 21, Issue 8, Pages 085201
Publisher
IOP Publishing
Online
2010-01-27
DOI
10.1088/0957-4484/21/8/085201

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