4.6 Article

Material removal mechanisms in chemical-magnetorheological compound finishing

Journal

Publisher

SPRINGER LONDON LTD
DOI: 10.1007/s00170-019-03594-5

Keywords

Chemical-magnetorheological compound finishing; Modelling; Polishing force; Material removal; SiC wafer

Funding

  1. NSFC-Guangdong Joint Fund Project [U1801259]
  2. Science and Technology Project of Guangdong Province [2016A010102014]
  3. Guangdong Graduate Education Innovation Project [2018JGXM35, 2018SFKC15]

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With a view to ultra-precision polishing of SiC wafers, the chemical-magnetorheological compound finishing (CMRF) method was proposed based on the principle of the Fenton reaction. To study material removal characteristics of CMRF, a force model for polishing pads based on magnetorheological (MR) effects was built. Through the theory of solid-phase particles, this study conducted a force analysis of carbonyl iron powders and abrasives and calculated polishing forces of a single polishing pad based on MR effects on a workpiece surface. Based on this, according to the Preston equation, a material removal model was established. By conducting the CMRF test on monocrystalline SiC wafers, it is found that the test results were consistent with theoretical calculations.

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