Composition determination of β-(AlxGa1−x)2O3layers coherently grown on (010) β-Ga2O3substrates by high-resolution X-ray diffraction

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Title
Composition determination of β-(AlxGa1−x)2O3layers coherently grown on (010) β-Ga2O3substrates by high-resolution X-ray diffraction
Authors
Keywords
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Journal
Applied Physics Express
Volume 9, Issue 6, Pages 061102
Publisher
Japan Society of Applied Physics
Online
2016-05-24
DOI
10.7567/apex.9.061102

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