Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 122, Issue 8, Pages -Publisher
SPRINGER
DOI: 10.1007/s00339-016-0292-4
Keywords
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Funding
- National Basic Research Program of China (973 Program) [2011CB013000]
- National Natural Science Foundation of China (NSFC) [91323301, 51505505]
- Natural Science Foundation of Hunan Province [2016JJ3147]
- China Postdoctoral Science Foundation [2015M572264, 2016T90757]
- Self-selected Topic Fund of State Key Laboratory of High Performance and Complex Manufacturing [ZZYJKT2015-08]
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This study proposes an ablation enhancement approach to fabricate microgrooves in PMMA by femtosecond laser irradiation assisted with a microtorch. The influences of pulse energy and scanning speed on the groove depth and removal area of groove are investigated. It is demonstrated that the improvement of groove depth has a close relationship with the scanning speed. When the scanning speed was less than 50 lm/s, the ablated groove depth is considerably improved with various pulse energies, up to 100 %. Moreover, the removal area of groove has significant enhancements of up to 250 % in various processing parameters. It is suggested that the ablation enhancement of microgrooves fabrication is related to the status of plasma plume and substrate heating. With the assistance of the microtorch, laser-induced plasma plume is confined and its density at center region is raised, which results in the increment of the central plasma's temperature and more energy deposited on the PMMA surface, ultimately leading to the ablation enhancement. Meanwhile, the instantaneous substrate heating also plays a crucial role on enhanced microgrooves fabrication.
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