Fabrication of micro-array of Fresnel rings on Si by electron beam lithography and reactive ion etching

Title
Fabrication of micro-array of Fresnel rings on Si by electron beam lithography and reactive ion etching
Authors
Keywords
PMMA, Field Emission Scanning Electron Microscope Image, Electron Beam Lithography, Process Pressure, Atomic Force Microscope Analysis
Journal
Publisher
Springer Nature
Online
2016-02-08
DOI
10.1007/s00339-016-9649-y

Ask authors/readers for more resources

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now