Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma

Published 2019 View Full Article

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Title
Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma
Authors
Keywords
Microwave plasma-assisted chemical vapour deposition, Optical emission spectroscopy, Boron-doped diamond, Hall effect, Raman spectroscopy
Journal
DIAMOND AND RELATED MATERIALS
Volume 96, Issue -, Pages 198-206
Publisher
Elsevier BV
Online
2019-05-09
DOI
10.1016/j.diamond.2019.05.005

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