Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma

出版年份 2019 全文链接

标题

作者

关键词

Microwave plasma-assisted chemical vapour deposition, Optical emission spectroscopy, Boron-doped diamond, Hall effect, Raman spectroscopy

出版物

Volume 96, Issue -, Pages 198-206

出版商

Elsevier BV

发表日期

2019-05-09

DOI

10.1016/j.diamond.2019.05.005

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