Toughness enhancement in TiN/WN superlattice thin films

Authors

Keywords

Superlattice, Fracture toughness, Thin film, Sputtering, DFT

Journal

ACTA MATERIALIA

Volume 172, Issue -, Pages 18-29

Publisher

Elsevier BV

Online

2019-04-17

DOI

10.1016/j.actamat.2019.04.028

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