Toughness enhancement in TiN/WN superlattice thin films

标题
Toughness enhancement in TiN/WN superlattice thin films
作者
关键词
Superlattice, Fracture toughness, Thin film, Sputtering, DFT
出版物
ACTA MATERIALIA
Volume 172, Issue -, Pages 18-29
出版商
Elsevier BV
发表日期
2019-04-17
DOI
10.1016/j.actamat.2019.04.028

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