Effect of Electrode Material on the Crystallization of GeTe Grown by Atomic Layer Deposition for Phase Change Random Access Memory

Title
Effect of Electrode Material on the Crystallization of GeTe Grown by Atomic Layer Deposition for Phase Change Random Access Memory
Authors
Keywords
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Journal
Micromachines
Volume 10, Issue 5, Pages 281
Publisher
MDPI AG
Online
2019-04-29
DOI
10.3390/mi10050281

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