Effect of Electrode Material on the Crystallization of GeTe Grown by Atomic Layer Deposition for Phase Change Random Access Memory
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Title
Effect of Electrode Material on the Crystallization of GeTe Grown by Atomic Layer Deposition for Phase Change Random Access Memory
Authors
Keywords
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Journal
Micromachines
Volume 10, Issue 5, Pages 281
Publisher
MDPI AG
Online
2019-04-29
DOI
10.3390/mi10050281
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