Correlating structural and mechanical properties of AlN/TiN superlattice films

标题
Correlating structural and mechanical properties of AlN/TiN superlattice films
作者
关键词
Superlattice, Ab initio, TEM, Elasticity, cleavage
出版物
SCRIPTA MATERIALIA
Volume 165, Issue -, Pages 159-163
出版商
Elsevier BV
发表日期
2019-03-02
DOI
10.1016/j.scriptamat.2019.02.021

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