On-chip silicon Mach–Zehnder interferometer sensor for ultrasound detection

Title
On-chip silicon Mach–Zehnder interferometer sensor for ultrasound detection
Authors
Keywords
-
Journal
OPTICS LETTERS
Volume 44, Issue 8, Pages 1928
Publisher
The Optical Society
Online
2019-04-04
DOI
10.1364/ol.44.001928

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