On-chip silicon Mach–Zehnder interferometer sensor for ultrasound detection

标题
On-chip silicon Mach–Zehnder interferometer sensor for ultrasound detection
作者
关键词
-
出版物
OPTICS LETTERS
Volume 44, Issue 8, Pages 1928
出版商
The Optical Society
发表日期
2019-04-04
DOI
10.1364/ol.44.001928

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