Deeply and vertically etched butte structure of vertical GaN p–n diode with avalanche capability

Title
Deeply and vertically etched butte structure of vertical GaN p–n diode with avalanche capability
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue SC, Pages SCCD25
Publisher
Japan Society of Applied Physics
Online
2019-05-28
DOI
10.7567/1347-4065/ab106c

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