Preparation of flower-shaped silica abrasives by double system template method and its effect on polishing performance of sapphire wafers

出版年份 2019 全文链接

标题

作者

关键词

Flower-shaped silica abrasive, Double system template method, Chemical mechanical polishing, Sapphire wafers

出版物

CERAMICS INTERNATIONAL

Volume 45, Issue 7, Pages 8471-8476

出版商

Elsevier BV

发表日期

2019-01-27

DOI

10.1016/j.ceramint.2019.01.158

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