Effects of post-lithography cleaning on the yield and performance of CVD graphene-based devices

Published 2019 View Full Article

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Title
Effects of post-lithography cleaning on the yield and performance of CVD graphene-based devices
Authors
Keywords
-
Journal
Beilstein Journal of Nanotechnology
Volume 10, Issue -, Pages 349-355
Publisher
Beilstein Institut
Online
2019-02-05
DOI
10.3762/bjnano.10.34

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