Effect of furnace annealing on the ferroelectricity of Hf0.5 Zr0.5O2 thin films

Published 2019 View Full Article

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Title
Effect of furnace annealing on the ferroelectricity of Hf0.5 Zr0.5O2 thin films
Authors
Keywords
Hafnium oxide, Ultrathin films, Remnant polarization, Ferroelectric switching, Furnace annealing, Thickness dependence
Journal
THIN SOLID FILMS
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-03-28
DOI
10.1016/j.tsf.2019.03.031

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