Effect of furnace annealing on the ferroelectricity of Hf0.5 Zr0.5O2 thin films

出版年份 2019 全文链接

标题

作者

关键词

Hafnium oxide, Ultrathin films, Remnant polarization, Ferroelectric switching, Furnace annealing, Thickness dependence

出版物

Volume -, Issue -, Pages -

出版商

Elsevier BV

发表日期

2019-03-28

DOI

10.1016/j.tsf.2019.03.031

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