Reactive sputter deposition of CoCrCuFeNi in oxygen/argon mixtures

Published 2019 View Full Article

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Title
Reactive sputter deposition of CoCrCuFeNi in oxygen/argon mixtures
Authors
Keywords
Sputter deposition, Multi-principal element alloys, Oxides
Journal
SURFACE & COATINGS TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-03-02
DOI
10.1016/j.surfcoat.2019.02.045

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