Effects of substrate bias and temperature on the structure and dielectric properties of Ti Zr1−N ternary nitride thin films

Published 2018 View Full Article

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Title
Effects of substrate bias and temperature on the structure and dielectric properties of Ti Zr1−N ternary nitride thin films
Authors
Keywords
Nitride, Thin film, Bias, Temperature, Dielectric properties
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 359, Issue -, Pages 258-264
Publisher
Elsevier BV
Online
2018-12-11
DOI
10.1016/j.surfcoat.2018.12.023

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