Rapid and low power laser actuation of sputter-deposited NiTi shape memory alloy (SMA) MEMS thermal bimorph actuators

Published 2019 View Full Article

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Title
Rapid and low power laser actuation of sputter-deposited NiTi shape memory alloy (SMA) MEMS thermal bimorph actuators
Authors
Keywords
Thin film, Shape memory alloy (SMA), Thermal actuators, MEMS, Residual stress, Fast optical actuation, Low power thermal actuators, Phase change actuators
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-03-29
DOI
10.1016/j.sna.2019.03.016

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